PRODUCTS

Pilot Line usage Aligner : TME-400R

Multipurpose Exposure Aligner.
Suitable for R&D, pilot line, and etc.

Pilot Line usage Aligner

  • Outline
  • Features
  • Specification

Outline

TME-400R has adapted to the work size from 100×100mm to 300×400mm. This exposure system can be used for various purposes, such as R&D, pilot line and small production, for member of flat panel display and others. By linking the work handling robot system, it will be possible to construct the semi-automatic exposure process. And it will also provide the exposure system which is suitable for large item small scale production.

Features

Features

■High Resolution
High performance optical systems and high precision mechanical control.
■Various Options
We also provide the option of accessing our know-how, developed over many years,
of evaluating various materials. We make possible the most suitable system construction
for our customers' R&D purposes.
■Small Foot-Print
Based on optical techniques accumulated over decades of experience, we have realized
a high precision and compact optical system, and combined it with a reduction in size for
space-saving needs.
 

Main Applications

►Resist manufactures
►Semiconductor manufactures
►LCD panel manufactures
►LCD’s color filter panel manufactures
►Touch panel manufactures
►OLED panel manufactures
►LED’s chip manufactures

Specification

Main Specification

Work size
□100~300×400mm
Work thickness
0.5 / 0.7 / 1.1mm
Work type
Silicon wafer , Glass  *LCD grade
Mask size
Work size +50mm、 t=2.0+0.1mm
Exposure area
300×400mm
Exposure energy
16mW/cm2 (i-line λ=365nm)   *2kW Mercury Lamp
Illuminance uniformity
<±5.0%
Resolution
L/S:7μm ±1.5μm *Proximity gap=50μm
Gap setting range
50~500μm
Size W×D×H
2,020×1,820×1,950mm
Weight
1,000kg

 

Option

  • Band-pass Filter        : i/h/g-line,  303nm, 313nm,334nm
  • ND Filter                   : 50~80%
  • Alignment function      : Auto or Manual
  • LampType                 : 2kW / 3.5kW / 5.0kW
  • Polarization control
  • Soft contact exposure
  • Multiple exposure control
  • vibration isolation system
  • Work transfer robot