Wafer Surface Analyzer : WM-10

More sensitivity and Eco-friendly
Ever seen under 90nm process node

Wafer Surface Analyzer

  • Outline
  • Features
  • Specification


WM-10 is high-end surface inspection system of our WM Series. This product can detect any type of micro defects on non-patterned wafer of semiconductor device and avilable for wide-range wafer size from 6-inch to 8-inch or from 8-inch to 12-inch. And this product is equipped with bule-violet semiconductor laser which is the world's first wafer surface analyzer in this field.  This laser makes a contribution to reduce the running cost. This prduct is eco-friendly, as well as being of high quality high speed measuring and low-priced. 


■ Provied the best solution for 65-90nm process node

■ World's first wafer surface analyzer using the violet-LD

■ Drastic reduction of the running cost by using the violet-LD

■ Low price / High performance / Small foot print / Easy operation

■ Separability of COP's and real dusts by using original optical system


Main Specification

 ► Light Source  Violet LD (blue-violet semiconductor)
 ► Scan system  Helical Scan
 ► Sensitivity  48nm  *Bare Wafer
 ► Repeatability  σ/X ≦ 1%  *99% or more
 ► Supported Wafer  Bare Wafer / Coated Wafer
 Wafer Size  12/8 inch or 8/6 inch
 Dimension W×D×H  1,482×1,173×1,950mm
 Weight  900kg



  • Automatic sensitivity adjustment function
  • Haze function
  • Double wafer port
  • Map overlapping function
  • X-Y coordinate output (Communication software)
  • Host communication software